Gabatarwa ga Rufin CVD TaC:
Rufin CVD TaC fasaha ce da ke amfani da tururin sinadarai don saka murfin tantalum carbide (TaC) a saman wani abu. Tantalum carbide abu ne mai inganci na yumbu tare da kyawawan halayen injiniya da sinadarai. Tsarin CVD yana samar da fim ɗin TaC iri ɗaya a saman abin da aka yi amfani da shi ta hanyar iskar gas.
Babban fasali:
Kyakkyawan taurin kai da juriyar lalacewa: Tantalum carbide yana da matuƙar tauri, kuma CVD TaC Coating na iya inganta juriyar lalacewa na substrate sosai. Wannan yana sa murfin ya dace da amfani a wurare masu yawan lalacewa, kamar kayan aikin yankewa da molds.
Kwanciyar Hankali Mai Girma: Rufin TaC yana kare muhimman abubuwan tanderu da reactor a yanayin zafi har zuwa 2200°C, wanda ke nuna kyakkyawan kwanciyar hankali. Yana kiyaye daidaiton sinadarai da na inji a ƙarƙashin yanayin zafi mai tsanani, wanda hakan ya sa ya dace da sarrafa zafin jiki mai yawa da aikace-aikace a cikin yanayin zafi mai yawa.
Kyakkyawan kwanciyar hankali na sinadarai: Tantalum carbide yana da ƙarfin juriya ga tsatsa ga yawancin acid da alkalis, kuma CVD TaC Coating na iya hana lalacewar substrate yadda ya kamata a cikin muhallin da ke lalata.
Babban wurin narkewa: Tantalum carbide yana da babban wurin narkewa (kimanin 3880°C), wanda ke ba da damar amfani da CVD TaC Coating a cikin yanayi mai zafi mai tsanani ba tare da narkewa ko lalata shi ba.
Kyakkyawan watsa wutar lantarki ta thermal: Rufin TaC yana da ƙarfin watsa zafi mai yawa, wanda ke taimakawa wajen wargaza zafi yadda ya kamata a cikin yanayin zafi mai yawa da kuma hana zafi mai yawa a gida.
Aikace-aikace masu yuwuwa:
• Abubuwan da ke cikin sinadaran reactor na Gallium Nitride (GaN) da Silicon Carbide, waɗanda suka haɗa da masu ɗaukar wafer, farantin tauraron ɗan adam, kan shawa, rufi, da kuma masu hana ruwa shiga.
• Abubuwan da ke cikin sinadarin silicon carbide, gallium nitride da aluminum nitride (AlN) waɗanda suka haɗa da tarkacen ƙarfe, masu riƙe iri, zoben jagora da matattara
• Abubuwan masana'antu ciki har da abubuwan dumama masu juriya, bututun allura, zoben rufe fuska da jigs na brazing
Fasaloli na aikace-aikace:
• Zafin jiki ya yi ƙarfi sama da 2000°C, wanda ke ba da damar aiki a yanayin zafi mai tsanani
• Yana jure wa hydrogen (Hz), ammonia (NH3), monosilane (SiH4) da silicon (Si), yana ba da kariya a cikin mawuyacin yanayi na sinadarai
• Juriyar girgizar zafi tana ba da damar hanzarta zagayowar aiki
• Graphite yana da manne mai ƙarfi, yana tabbatar da tsawon rai na aiki kuma babu lalata rufin.
• Tsafta mai matuƙar ƙarfi don kawar da ƙazanta ko gurɓatattun abubuwa marasa amfani
• Rufin shafi mai tsari zuwa ga juriya mai tsauri
Bayanan fasaha:
Shirye-shiryen rufin tantalum carbide mai yawa ta hanyar CVD:
Shafi na TAC tare da babban crystallinity da kyakkyawan daidaito:
Sigogi na Fasaha na CVD TAC COATING_Semicera:
| Halayen jiki na murfin TaC | |
| Yawan yawa | 14.3 (g/cm³) |
| Yawan Taro | 8 x 1015/cm |
| Takamaiman fitarwa | 0.3 |
| Ma'aunin faɗaɗa zafin jiki | 6.3 10-6/K |
| Taurin kai (HK) | HK 2000 |
| Juriyar Girma | 4.5 ohm-cm |
| Juriya | 1x10-5Ohm*cm |
| Kwanciyar hankali ta zafi | <2500℃ |
| Motsi | 237 cm2/Vs |
| Canje-canje a girman graphite | -10~-20um |
| Kauri na shafi | Matsakaicin ƙima ≥um 20 (um 35+um 10) |
Abubuwan da ke sama dabi'u ne na yau da kullun.













