Blue/koren LED epitaxy daga semicera yana ba da mafita mai yanke hukunci don babban aikin masana'antar LED. An ƙera shi don tallafawa hanyoyin haɓaka haɓakar ci gaba na epitaxial, fasaha na Semicera's Blue/green LED epitaxy fasaha yana haɓaka inganci da daidaito wajen samar da LEDs shuɗi da kore, mai mahimmanci ga aikace-aikacen optoelectronic iri-iri. Yin amfani da Si Epitaxy na zamani da SiC Epitaxy, wannan bayani yana tabbatar da kyakkyawan inganci da dorewa.
A cikin tsarin masana'antu, MOCVD Susceptor yana taka muhimmiyar rawa, tare da abubuwa kamar PSS Etching Carrier, ICP Etching Carrier, da RTP Carrier, waɗanda ke haɓaka yanayin haɓakar epitaxial. Semicera's Blue/ Green LED epitaxy an ƙera shi don samar da tsayayye goyon baya ga LED Epitaxial Susceptor, Barrel Susceptor, da Monocrystalline Silicon, yana tabbatar da samar da daidaito, sakamako mai inganci.
Wannan tsari na epitaxy yana da mahimmanci don ƙirƙirar ɓangarorin Photovoltaic kuma yana goyan bayan aikace-aikace kamar GaN akan SiC Epitaxy, haɓaka ingantaccen ingantaccen semiconductor gabaɗaya. Ko a cikin tsarin Pancake Susceptor ko amfani da shi a cikin wasu saitunan ci gaba, Semicera's Blue / Green LED epitaxy mafita suna ba da ingantaccen aiki, yana taimaka wa masana'anta su cika buƙatun haɓaka abubuwan haɓaka LED masu inganci.
Babban fasali:
1. High zafin jiki oxidation juriya:
juriya na iskar oxygen har yanzu yana da kyau sosai lokacin da zafin jiki ya kai 1600 C.
2. Babban tsarki: sanya ta hanyar tururin sinadarai a ƙarƙashin yanayin chlorination mai zafi.
3. Juriya juriya: babban taurin, m surface, lafiya barbashi.
4. Lalata juriya: acid, alkali, gishiri da kuma Organic reagents.
Babban Bayani naCVD-SIC Coating
| SiC-CVD Properties | ||
| Tsarin Crystal | FCC β lokaci | |
| Yawan yawa | g/cm ³ | 3.21 |
| Tauri | Vickers taurin | 2500 |
| Girman hatsi | μm | 2 ~ 10 |
| Tsaftar Sinadari | % | 99.99995 |
| Ƙarfin zafi | J·k-1 · K-1 | 640 |
| Zazzabi Sublimation | ℃ | 2700 |
| Ƙarfin Felexural | MPa (RT 4-maki) | 415 |
| Modul na Young | Gpa (4pt lankwasa, 1300 ℃) | 430 |
| Ƙarfafa Ƙarfafawa (CTE) | 10-6K-1 | 4.5 |
| Ƙarfafawar thermal | (W/mK) | 300 |
