RTPCVD SiC zobeana amfani da su sosai a cikin masana'antu da filayen kimiyya a cikin yanayin zafi mai zafi da lalata muhalli. Yana taka muhimmiyar rawa a masana'antar semiconductor, optoelectronics, injunan injuna da masana'antar sinadarai. takamaiman aikace-aikace sun haɗa da:
1. Semiconductor masana'anta:RTP CVD SiC zobeza a iya amfani dashi don dumama da sanyaya kayan aikin semiconductor, samar da ingantaccen kula da zafin jiki da kuma tabbatar da daidaito da daidaiton tsari.
2. Optoelectronics: Saboda kyakkyawan yanayin yanayin zafi da yanayin zafi mai zafi, RTPCVD SiC zobeza a iya amfani da a matsayin goyon baya da zafi dissipation kayan don Laser, fiber na gani sadarwa kayan aiki da kuma na gani aka gyara.
3. Daidaitaccen kayan aiki: RTP CVD SiC zoben za a iya amfani dashi don kayan aiki da kayan aiki a cikin yanayin zafi mai zafi da lalata, irin su wutar lantarki mai zafi, na'urori masu amfani da sinadarai.
4. Chemical masana'antu: Saboda ta lalata juriya da kuma sinadaran kwanciyar hankali, RTP CVD SiC zobe za a iya amfani da a kwantena, bututu da reactors a sinadaran halayen da catalytic matakai.
Tsarin Epi
Tsarin RTP
Tsarin CVD
Ayyukan samfur:
1. Haɗu da tsarin da ke ƙasa 28nm
2. Super lalata juriya
3. Super tsabta yi
4. Super taurin
5. Babban yawa
6. High zafin jiki juriya
7. Sanya juriya
Aikace-aikacen samfur:
Silicon carbide kayan suna da halaye na high taurin, sa juriya, lalata juriya da high zafin jiki kwanciyar hankali. Ana amfani da samfuran da ke da ingantaccen aiki sosai a cikin busassun etching da TF/Diffusion tafiyar matakai.
Ayyukan samfur:
1. Haɗu da tsarin da ke ƙasa 28nm
2. Super lalata juriya
3. Super tsabta yi
4. Super taurin
5. Babban yawa
6. High zafin jiki juriya
7. Sanya juriya
Haɓaka tsarin haɗe-haɗe:
Graphite + Sic Coating
Solide CVD sic
Sintered SiC+CVD
SicSintered SiC
Haɓaka nau'in samfuri da yawa:
Zobe
Tebur
Susceptor
Shugaban Shawa