Babban Tsarkake SiC Mai Rufin Graphite Wafer Mai ɗaukar Susceptor

Babban Tsarkake SiC Mai Rufaffen Zane-zane Wafer Mai ɗaukar Susceptor Featurer Hoton

Takaitaccen Bayani:

Semicera's High Purity SiC Carrier Susceptor an ƙera shi don ci gaba na semiconductor da ayyukan masana'antar LED, yana ba da ingantaccen yanayin zafi da ingantaccen aiki a yanayin zafi. An yi shi daga siliki carbide mai tsafta, wannan mai ɗaukar hoto yana tabbatar da ingantaccen rarraba zafi, ingantacciyar daidaituwar tsari, da ƙara ƙarfin ƙarfi. Mafi dacewa don MOCVD, CVD, da sauran aikace-aikace masu zafi, Semicera's SiC mai ɗaukar hoto yana ba da ingantaccen aiki mai dorewa kuma yana taimakawa haɓaka haɓakar samarwa da ingancin samfur.

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Bayani

Silicon carbide yumbura suna da kyawawan kaddarorin inji a zazzabi na ɗaki, kamar ƙarfi mai ƙarfi, ƙarfi mai ƙarfi, matsakaicin ƙarfi mai ƙarfi, da sauransu, Hakanan yana da kyakkyawan kwanciyar hankali mai zafin jiki kamar haɓakar haɓakar thermal, ƙarancin haɓakar haɓakar thermal, da ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙarfi da gani. aiki aiki.
Suna dacewa musamman don samar da madaidaicin sassan yumbu don kayan aikin da'ira kamar na'urorin lithography, galibi ana amfani da su don kera mai ɗaukar SiC / mai ɗaukar hoto, SiC wafer jirgin ruwa, fayafai tsotsa, farantin sanyaya ruwa, ma'aunin ma'auni daidai, grating da sauran sassan tsarin yumbu.

dako2

mai ɗaukar nauyi3

mai ɗaukar nauyi4

Amfani

High zafin jiki juriya: al'ada amfani a 1800 ℃
High thermal watsin: daidai da graphite abu
Babban taurin: taurin na biyu kawai zuwa lu'u-lu'u, boron nitride
Lalacewa juriya: karfi acid da alkali ba su da lalata a gare shi, da lalata juriya ne mafi alhẽri daga tungsten carbide da alumina.
Hasken nauyi: ƙananan yawa, kusa da aluminum
Babu nakasawa: ƙarancin haɓakar haɓakar thermal
Juriyar girgiza zafin jiki: yana iya jure yanayin zafi mai kaifi, tsayayya da girgiza zafi, kuma yana da ingantaccen aiki
Silicon carbide m kamar sic etching m, ICP etching susceptor, ana amfani da ko'ina a semiconductor CVD, injin sputtering da dai sauransu Za mu iya samar da abokan ciniki da musamman wafer diko na silicon da silicon carbide kayan saduwa daban-daban aikace-aikace.

Amfani

Dukiya	Daraja	Hanya
Yawan yawa	3.21 g/c	Nitse-tasowa da girma
Musamman zafi	0.66 J/g °K	Filashin Laser mai ƙwanƙwasa
Ƙarfin sassauƙa	450 MPa 560 MPa	Lankwasa maki 4, lankwasa maki RT4, 1300°
Karya tauri	2.94MPa m1/2	Microindentation
Tauri	2800	Vickers, 500 g na kaya
Elastic ModulusYoung's Modulus	450 GPA430	4 pt lanƙwasa, RT4 pt lanƙwasa, 1300 °C
Girman hatsi	2-10 m	SEM

Bayanin Kamfanin

WeiTai Energy Technology Co., Ltd. shine babban mai ba da kayayyaki na ci-gaba na yumbu na semiconductor kuma kawai masana'anta a China waɗanda zasu iya samar da yumbu mai tsafta na silicon carbide (musamman SiC na Recrystallized) da kuma CVD SiC. Bugu da kari, kamfaninmu kuma ya himmatu ga filayen yumbu kamar alumina, aluminum nitride, zirconia, da silicon nitride, da sauransu.

Babban samfuranmu da suka haɗa da: Silicon carbide etching disc, silicon carbide jirgin ruwan, jirgin ruwan silicon carbide wafer (Photovoltaic&Semiconductor), bututun wutar lantarki na silicon carbide, filafin silicon carbide cantilever, silicon carbide chucks, silicon carbide katako, kazalika da CVD SiC shafi da TaC shafi. Abubuwan da aka fi amfani da su a cikin masana'antar semiconductor da masana'antar hoto, kamar kayan aiki don haɓakar crystal, epitaxy, etching, marufi, rufi da tanderun watsawa, da sauransu.
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