Babban mai ɗaukan SiC / Susceptor

Hotunan da aka Fitar da Mai ɗaukar SiC/Mafi Girma

Takaitaccen Bayani:

Silicon carbide bearing disc ana kuma san shi da SIC tray, silicon carbide etching disc, ICP etching disc. Silicon carbide tray na LED etching (SiC tray) φ600mm na'ura ce ta musamman don etching silicon mai zurfi ( inji ICP etching).

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Bayani

Silicon carbide yumbura suna da kyawawan kaddarorin inji a zazzabi na ɗaki, kamar ƙarfi mai ƙarfi, ƙarfi mai ƙarfi, matsakaicin ƙarfi mai ƙarfi, da sauransu, Hakanan yana da kyakkyawan kwanciyar hankali mai zafin jiki kamar haɓakar haɓakar thermal, ƙarancin haɓakar haɓakar thermal, da ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙarfi da gani. aikin sarrafawa.
Suna dacewa musamman don samar da madaidaicin sassan yumbu don kayan aikin da'ira kamar na'urorin lithography, galibi ana amfani da su don kera mai ɗaukar SiC / mai ɗaukar hoto, SiC wafer jirgin ruwa, fayafai tsotsa, farantin sanyaya ruwa, ma'aunin ma'auni daidai, grating da sauran sassan tsarin yumbu.

mai ɗaukar kaya2

mai ɗaukar nauyi3

mai ɗaukar nauyi4

Amfani

High zafin jiki juriya: al'ada amfani a 1800 ℃
High thermal watsin: daidai da graphite abu
Babban taurin: taurin na biyu kawai zuwa lu'u-lu'u, boron nitride
Juriya na lalata: acid mai ƙarfi da alkali ba su da lahani gare shi, juriya na lalata ya fi tungsten carbide da alumina kyau.
Hasken nauyi: ƙananan yawa, kusa da aluminum
Babu nakasawa: ƙarancin haɓakar haɓakar thermal
Juriyar girgiza zafin jiki: yana iya jure yanayin zafin zafi mai kaifi, tsayayya da girgiza zafi, kuma yana da ingantaccen aiki
Silicon carbide m kamar sic etching m, ICP etching susceptor, ana amfani da ko'ina a semiconductor CVD, injin sputtering da dai sauransu Za mu iya samar da abokan ciniki da musamman wafer diko na silicon da silicon carbide kayan saduwa daban-daban aikace-aikace.

Amfani

Dukiya	Daraja	Hanya
Yawan yawa	3.21 g/c	Nitse-tasowa da girma
Musamman zafi	0.66 J/g °K	Filashin Laser mai ƙwanƙwasa
Ƙarfin sassauƙa	450 MPa 560 MPa	Lankwasa maki 4, lanƙwasa maki RT4, 1300°
Karya tauri	2.94MPa m1/2	Microindentation
Tauri	2800	Vickers, 500 g na kaya
Elastic ModulusYoung's Modulus	450 GPA430	4 pt lanƙwasa, RT4 pt lanƙwasa, 1300 °C
Girman hatsi	2-10 m	SEM

Bayanin Kamfanin

WeiTai Energy Technology Co., Ltd. shine babban mai ba da kayayyaki na ci-gaba na yumbu na semiconductor kuma kawai masana'anta a China waɗanda zasu iya samar da yumbu mai tsafta na silicon carbide (musamman SiC na Recrystallized) da kuma CVD SiC. Bugu da kari, kamfaninmu kuma ya himmatu ga filayen yumbu kamar alumina, aluminum nitride, zirconia, da silicon nitride, da sauransu.

Babban samfuranmu da suka haɗa da: Silicon carbide etching disc, silicon carbide jirgin ruwan, jirgin ruwan silicon carbide wafer (Photovoltaic&Semiconductor), bututun wutar lantarki na silicon carbide, filafin silicon carbide cantilever, silicon carbide chucks, silicon carbide katako, kazalika da CVD SiC shafi da TaC shafi. Abubuwan da aka fi amfani da su a cikin masana'antar semiconductor da masana'antar hoto, kamar kayan aiki don haɓakar crystal, epitaxy, etching, marufi, rufi da tanderun watsawa, da sauransu.
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