Isostatic PECVD Graphite Boat

Takaitaccen Bayani:

Isostatic PECVD graphite jirgin ruwa da aka yadu amfani a daban-daban links na semiconductor masana'antu, kamar polysilicon film adibas, oxide film adibas, nitride film shaida, da dai sauransu Its kyakkyawan yi ya sa shi manufa wafer m a cikin PECVD tsari.

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Cikakken Bayani

Tags samfurin

SEMICERA isostatic PECVD graphite jirgin ruwa ne mai tsafta, high-yawa graphite samfurin tsara don wafer goyon baya a cikin PECVD (plasma ingantacciyar sinadari tururi ajiya) tsari. SEMICERA tana amfani da ingantacciyar fasahar latsawa ta isostatic don tabbatar da cewa jirgin ruwan graphite yana da kyakkyawan juriya na zafin jiki, juriya na lalata, kwanciyar hankali mai girma da kyakkyawan yanayin zafi, wanda shine babban abin amfani a cikin tsarin masana'antar semiconductor.

SEMICERA isostatic PECVD graphite jirgin ruwan yana da fa'idodi masu zuwa:

▪ Tsabta mai girma: Kayan graphite yana da tsafta mai girma da ƙarancin ƙazanta don gujewa gurɓata saman wafer.

▪ Babban yawa: Babban yawa, ƙarfin injina mai ƙarfi, na iya jure yanayin zafi da matsanancin yanayi.

▪ Kyakkyawan kwanciyar hankali: Canjin ƙarami a babban zafin jiki don tabbatar da kwanciyar hankali.

▪ Kyakkyawan yanayin zafi: Canja wurin zafi yadda ya kamata don hana zafi mai zafi.

Ƙarfin juriya mai ƙarfi: Mai iya jurewa zaizayar iskar gas iri-iri da plasma.

Sigar aiki	semicera	Saukewa: R6510	Sigar aiki
Yawan yawa (g/cm3)	1.91	1.83	1.85
Ƙarfin lanƙwasawa (MPa)	63	60	49
Ƙarfin matsawa (MPa)	135	130	103
Hardness Shore (HS)	70	64	60
Coefficient na thermal fadadawa (10-6/K)	85	105	130
Coefficient na thermal fadadawa (10-6/K)	5.85	4.2	5.0
Resistivity (μΩm)	11-13	13	10

Amfanin zabar mu:
Zaɓin kayan abu: Ana amfani da kayan graphite masu tsafta don tabbatar da ingancin samfur.
▪ Fasahar sarrafawa: Ana amfani da matsi na isostatic don tabbatar da yawan samfur da daidaito.
Ƙimar Girman Girma: Za a iya ƙera jiragen ruwa masu girma dabam da siffofi daban-daban bisa ga bukatun abokin ciniki.
▪ Maganin saman ƙasa: Ana ba da hanyoyi daban-daban na jiyya na sama, kamar suttura silicon carbide, boron nitride, da sauransu, don biyan buƙatun tsari daban-daban.