Babban dalilan da ke shafar daidaituwar radial resistivity na lu'ulu'u guda ɗaya sune flatness na ƙaƙƙarfan ƙa'idar ruwa da ƙaramin tasirin jirgin sama yayin haɓakar crystal.
Tasirin flatness na m-ruwa dubawa A lokacin girma crystal, idan narke ne zuga a ko'ina, daidai juriya surface ne m-ruwa dubawa (najasa maida hankali a cikin narkewa ne daban-daban daga najasa maida hankali a cikin crystal, don haka. resistivity ya bambanta, kuma juriya daidai yake kawai a madaidaicin ruwa mai ƙarfi). Lokacin da ƙazanta K <1, ƙirar keɓancewa zuwa narke zai haifar da tsayayyar radial don zama babba a tsakiya da ƙasa a gefen, yayin da keɓancewar keɓancewa zuwa narkewa shine akasin haka. The radial resistivity uniformity na lebur m-ruwa dubawa ne mafi alhẽri. Siffar ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun abubuwa kamar rarraba filin thermal da sigogin girma na kristal. A cikin madaidaicin kristal guda ɗaya da aka ja, siffar ƙaƙƙarfan farfajiyar ruwa shine sakamakon haɗakar tasirin abubuwa kamar rarraba zafin wutar tanderu da rarrabuwar zafi.
Lokacin ja lu'ulu'u, akwai manyan nau'ikan musayar zafi guda huɗu a madaidaicin ruwa mai ƙarfi:
Latent zafin canjin lokaci da aka saki ta narkakkar siliki
Gudanar da zafi na narkewa
Gudanar da zafi zuwa sama ta wurin crystal
Radiation zafi waje ta cikin crystal
The latent zafi ne uniform ga dukan dubawa, da kuma girmansa ba ya canja lokacin da girma rate ne akai. (Gudanar da zafi mai sauri, saurin sanyaya, da haɓaka ƙimar ƙarfafawa)
Lokacin da shugaban kristal mai girma yana kusa da sandar kristal mai sanyaya ruwa mai sanyaya ruwa na tanderun crystal guda ɗaya, yanayin zafin jiki a cikin crystal yana da girma, wanda ke sa yanayin zafi mai tsayi na kristal ya fi zafi zafi, don haka m-ruwa dubawa convex zuwa narke.
Lokacin da lu'ulu'u ya girma zuwa tsakiya, tafiyar da zafi mai tsayi yana daidai da zafin radiation na saman, don haka dubawa yana tsaye.
A wutsiya na kristal, tafiyar da zafi mai tsayi bai kai zafin radiation na saman ƙasa ba, yana mai da ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙayyadaddun ƙayyadaddun ruwa zuwa narke.
Domin samun lu'ulu'u ɗaya tare da juriya na radial iri ɗaya, dole ne a daidaita ma'aunin ruwan ruwa mai ƙarfi.
Hanyoyin da aka yi amfani da su sune: ① Daidaita tsarin zafin jiki na crystal don rage yawan zafin jiki na radial na filin zafi.
② Daidaita sigogin aikin ja na crystal. Misali, don mahaɗar mu'amala zuwa narke, ƙara saurin ja don ƙara ƙimar ƙarfi mai ƙima. A wannan lokacin, saboda karuwa a cikin zafin jiki na latent crystallization da aka saki a kan dubawa, zafin jiki narke kusa da dubawa yana ƙaruwa, wanda ya haifar da narkewar wani ɓangare na crystal a wurin dubawa, yana yin lebur. Akasin haka, idan haɓakar haɓakar haɓakar haɓakar haɓakar haɓakar haɓakar haɓakar haɓakar haɓakar haɓakar za ta iya rage girman girma, kuma narkewar zai ƙarfafa ƙarar da ta dace, yana mai da haɓakar haɓakar haɓaka.
③ Daidaita saurin juyawa na kristal ko crucible. Ƙara saurin jujjuyawar kristal zai ƙara kwararar ruwa mai zafin jiki wanda ke motsawa daga ƙasa zuwa sama a madaidaicin ruwa mai ƙarfi, yana yin canjin mu'amala daga convex zuwa concave. Jagoran kwararar ruwa da ke haifar da jujjuyawar crucible daidai yake da na convection na halitta, kuma tasirin ya sabawa na jujjuyawar crystal.
④ Ƙara girman girman diamita na ciki na crucible zuwa diamita na crystal zai daidaita ma'aunin ruwa mai ƙarfi, kuma zai iya rage yawan raguwa da abun ciki na oxygen a cikin crystal. Gabaɗaya, diamita mai ƙyalƙyali: diamita crystal = 3 ~ 2.5: 1.
Tasirin ƙananan tasirin jirgin sama
Ƙaƙƙarfan ƙaƙƙarfan ƙayyadaddun ruwa na ci gaban kristal sau da yawa yana lanƙwasa saboda iyakancewar isotherm na narkewa a cikin crucible. Idan an ɗaga lu'ulu'u cikin sauri yayin haɓakar kristal, ƙaramin jirgin sama mai fa'ida zai bayyana a ma'aunin ruwa mai ƙarfi na (111) germanium da lu'ulu'u ɗaya na silicon. Shi ne (111) atomic jirgin da ke kusa da shi, wanda galibi ake kira karamin jirgi.
Matsakaicin ƙazanta a cikin ƙaramin yanki na jirgin sama ya sha bamban da na yankin da ba ƙaramin jirgi ba. Wannan al'amari na rashin daidaituwa na rarraba ƙazanta a cikin ƙananan filin jirgin sama ana kiransa ƙananan tasirin jirgin sama.
Saboda ƙananan tasirin jirgin sama, juriya na ƙananan filin jirgin sama zai ragu, kuma a lokuta masu tsanani, ƙananan bututu na ƙazanta zai bayyana. Don kawar da inhomogeneity na radial resistivity wanda ƙananan tasirin jirgin sama ya haifar, ana buƙatar daidaitawar ƙirar ruwa mai ƙarfi.
Maraba da kowane abokin ciniki daga ko'ina cikin duniya don ziyartar mu don ƙarin tattaunawa!
https://www.semi-cera.com/
https://www.semi-cera.com/tac-coating-monocrystal-growth-parts/
https://www.semi-cera.com/cvd-coating/
Lokacin aikawa: Yuli-24-2024