Ƙarshen gaba na layin samarwa yana kama da aza harsashi da gina bangon gida. A cikin masana'antar semiconductor, wannan matakin ya ƙunshi ƙirƙirar sifofi na asali da transistor akan wafer silicon.
Mahimman Matakan FEOL:
1. Tsaftacewa:Fara da siliki na siliki na bakin ciki kuma tsaftace shi don cire duk wani datti.
2. Oxidation:Shuka Layer na silicon dioxide akan wafer don ware sassa daban-daban na guntu.
3. Hoto:Yi amfani da hotolithography don tsara alamu akan wafer, kama da zana zane da haske.
4. Etching:Kashe silicon dioxide maras so don bayyana tsarin da ake so.
5. Doping:Gabatar da ƙazanta a cikin silicon don canza kayan lantarki, ƙirƙirar transistor, tushen ginin kowane guntu.
Tsakanin Ƙarshen Layi (MEOL): Haɗa ɗigon
Tsakanin ƙarshen layin samarwa yana kama da shigar da wayoyi da famfo a cikin gida. Wannan matakin yana mayar da hankali kan kafa haɗin kai tsakanin transistor da aka kirkira a matakin FEOL.
Mahimman Matakan MEOL:
1. Dielectric Deposition:Ajiye yadudduka masu rufewa (wanda ake kira dielectrics) don kare transistor.
2. Tsarin Tuntuɓa:Samar da lambobi don haɗa transistor zuwa juna da duniyar waje.
3. Haɗin kai:Ƙara yadudduka na ƙarfe don ƙirƙirar hanyoyi don siginonin lantarki, kama da na'ura mai ba da hanya tsakanin hanyoyin sadarwa don tabbatar da wutar lantarki mara kyau da kwararar bayanai.
Ƙarshen Layi na Baya (BEOL): Ƙarshen Taɓa
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Ƙarshen ƙarshen layin samarwa yana kama da ƙara ƙarar ƙarewa zuwa gida - shigar da kayan aiki, zanen, da tabbatar da komai yana aiki. A cikin masana'antar semiconductor, wannan matakin ya ƙunshi ƙara matakan ƙarshe da shirya guntu don marufi.
Mabuɗin Matakan BEOL:
1. Ƙarin Rarraba Ƙarfe:Ƙara yadudduka na ƙarfe da yawa don haɓaka haɗin kai, tabbatar da guntu na iya ɗaukar ayyuka masu rikitarwa da manyan gudu.
2. Tashin hankali:Aiwatar da matakan kariya don kare guntu daga lalacewar muhalli.
3. Gwaji:Bada guntu zuwa tsauraran gwaji don tabbatar da ya dace da duk ƙayyadaddun bayanai.
4. Dinku:Yanke wafern cikin kwakwalwan kwamfuta guda ɗaya, kowanne a shirye don marufi da amfani a cikin na'urorin lantarki.
Lokacin aikawa: Jul-08-2024