Tsarin etching bushe yakan ƙunshi jihohi huɗu na asali: kafin etching, ɗan ƙaramin etching, kawai etching, da kan etching. Babban halayen su ne etching rate, selectivity, m size, uniformity, and endpoint detection. Hoto na 1 Kafin etching Hoto 2 Sashe na etching Hoto…
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