Hanyar shiri na gama-gari na TaC mai rufaffiyar sassa

KASHI/1
CVD (Chemical Tururi Deposition) Hanyar:
A 900-2300 ℃, ta amfani da TaCl₅da CnHm a matsayin tantalum da carbon kafofin, H₂ kamar yadda rage yanayi, Ar₂as m gas, dauki deposition film. Rufin da aka shirya shi ne m, uniform da high tsarki. Duk da haka, akwai wasu matsaloli kamar tsari mai rikitarwa, tsada mai tsada, kula da iska mai wahala da ƙarancin ajiya.
KASHI/2
Hanyar slurry sintering:
slurry mai ɗauke da tushen carbon, tushen tantalum, mai rarrabawa da ɗaure ana lulluɓe shi akan graphite kuma an sanya shi a babban zafin jiki bayan bushewa. Rufin da aka shirya yana girma ba tare da daidaitawa na yau da kullun ba, yana da ƙarancin farashi kuma ya dace da samar da manyan sikelin. Ya rage da za a bincika don cimma daidaituwa da cikakken shafi akan manyan graphite, kawar da lahani na tallafi da haɓaka ƙarfin haɗin gwiwa.
KASHI/3
Hanyar fesa Plasma:
Ana narkar da foda taC ta plasma arc a babban zafin jiki, ana sanya shi cikin matsanancin zafin jiki ta jet mai sauri, kuma ana fesa saman kayan graphite. Yana da sauƙi don samar da Layer oxide a ƙarƙashin mara amfani, kuma yawan makamashi yana da girma.

 

Hoto . Wafer tire bayan amfani a cikin GaN epitaxial girma MOCVD na'urar (Veeco P75). Wanda ke gefen hagu an lullube shi da TaC sannan na hannun dama an lullube shi da SiC.

TaC mai rufigraphite sassa bukatar a warware

KASHI/1
Ƙarfin ɗaure:
The thermal fadada coefficient da sauran jiki Properties tsakanin TaC da carbon kayan ne daban-daban, da shafi bonding ƙarfi ne low, da wuya a kauce wa fasa, pores da thermal danniya, da kuma shafi ne mai sauki kwasfa a cikin ainihin yanayi dauke da rot da kuma. maimaita tashi da sanyaya tsari.
KASHI/2
Tsafta:
TaC shafiyana buƙatar zama tsafta mai ƙarfi don guje wa ƙazanta da ƙazanta a ƙarƙashin yanayin zafin jiki mai ƙarfi, kuma ana buƙatar yarda da ingantattun matakan abun ciki da ƙayyadaddun ƙayyadaddun ƙazanta na carbon kyauta da ƙazanta na zahiri a saman da ciki na cikakken sutura.
KASHI/3
Kwanciyar hankali:
High zafin jiki juriya da sinadaran yanayi juriya a sama 2300 ℃ su ne mafi muhimmanci Manuniya don gwada kwanciyar hankali na shafi. Rahoto, fasa, ɓangarorin da suka ɓace, da iyakokin hatsi guda ɗaya suna da sauƙi don haifar da gurɓatattun iskar gas don kutsawa da shiga cikin graphite, wanda ke haifar da gazawar kariya.
KASHI/4
Juriya na Oxidation:
TaC ta fara oxidize zuwa Ta2O5 lokacin da yake sama da 500 ℃, kuma adadin iskar shaka yana ƙaruwa sosai tare da haɓakar zafin jiki da haɓakar iskar oxygen. Rashin iskar oxygen yana farawa daga iyakokin hatsi da ƙananan hatsi, kuma a hankali ya samar da lu'ulu'u na columnar da lu'ulu'u masu karya, wanda ya haifar da adadi mai yawa da ramuka, kuma iskar oxygen yana ƙaruwa har sai an cire murfin. Sakamakon oxide Layer yana da ƙarancin yanayin zafi da launuka iri-iri a cikin bayyanar.
KASHI/5
Uniformity da rashin ƙarfi:
Rashin daidaituwa na shimfidar rufin zai iya haifar da ƙaddamar da damuwa na thermal na gida, ƙara haɗarin fashewa da spalling. Bugu da ƙari, rashin ƙarfi na saman yana rinjayar hulɗar da ke tsakanin rufin da kuma yanayin waje, kuma maɗaukaki mai yawa cikin sauƙi yana haifar da ƙarar juzu'i tare da wafer da filin zafi mara daidaituwa.
KASHI/6
Girman hatsi:
Girman hatsi iri ɗaya yana taimakawa kwanciyar hankali na sutura. Idan girman hatsi ya yi ƙanƙara, haɗin ba shi da ƙarfi, kuma yana da sauƙin zama oxidized da lalata, yana haifar da adadi mai yawa da ramuka a gefen hatsi, wanda ya rage aikin kariya na sutura. Idan girman hatsi ya yi girma sosai, yana da ɗanɗano kaɗan, kuma rufin yana da sauƙi don kashewa a ƙarƙashin damuwa na thermal.