Menene manyan matakai a cikin sarrafa sinadarai na SiC?

 

Yadda muke samar da matakan sarrafawa don SiC substrates sune kamar haka:

 

1. Crystal Orientation:

Yin amfani da diffraction X-ray don daidaita ingot crystal. Lokacin da fitilar X-ray aka nufa a fuskar kristal da ake so, kusurwar katakon da aka watsar yana ƙayyade madaidaicin crystal.

 

2. Nikawar Diamita Na Waje:

Lu'ulu'u guda daya da aka girma a cikin ginshiƙan graphite sukan wuce daidaitattun diamita. Nika diamita na waje yana rage su zuwa daidaitattun masu girma dabam.

 

 

3.Karshen Niƙawar Fuska:

4-inch 4H-SiC substrates yawanci suna da gefuna matsayi biyu, firamare da sakandare. Ƙarshen fuska niƙa yana buɗe waɗannan gefuna na matsayi.

 

4. Waya:

Waya sawing mataki ne mai mahimmanci wajen sarrafa kayan aikin 4H-SiC. Kararraki da lalacewar ƙasa da ke haifarwa yayin tsinken waya suna yin tasiri mara kyau ga matakai na gaba, tsawaita lokacin sarrafawa da haifar da asarar abu. Hanyar da ta fi dacewa ita ce sawing multi-waya tare da abrasive lu'u-lu'u. Motsi mai jujjuyawa na wayoyi na ƙarfe da aka haɗa tare da abrasives lu'u-lu'u ana amfani da shi don yanke ingot 4H-SiC.

 

5. Tafiya:

Don hana guntuwar gefuna da rage asarar da za a iya amfani da ita yayin tafiyar matakai na gaba, ana ɓata ɓangarorin ɓangarorin ɓangarorin waya zuwa ƙayyadaddun siffofi.

 

6. Bakin ciki:

Waya sawing yana barin ɓarna da yawa da lalacewar ƙasa. Ana yin bakin ciki ta amfani da ƙafafun lu'u-lu'u don cire waɗannan lahani gwargwadon yiwuwa.

 

7. Nika:

Wannan tsari ya haɗa da niƙa mai ɗanɗano da niƙa mai kyau ta amfani da ƙarami mai girman boron carbide ko abrasives na lu'u-lu'u don cire ragowar lahani da sabbin lahani da aka gabatar yayin siriri.

 

8. gogewa:

Matakan ƙarshe sun haɗa da gyaɗa mai ɗanɗano da gogewa mai kyau ta amfani da alumina ko abrasives na silicon oxide. Ruwan goge-goge yana tausasa saman, wanda sai a cire shi ta hanyar abrasives. Wannan matakin yana tabbatar da santsi kuma mara lahani.

 

9. Tsaftacewa:

Cire barbashi, karafa, fina-finai oxide, ragowar kwayoyin halitta, da sauran gurɓatattun abubuwan da aka bari daga matakan sarrafawa.