TheMOCVDHanyar ita ce ɗayan mafi kwanciyar hankali tafiyar matakai a halin yanzu da ake amfani da su a cikin masana'antar don haɓaka manyan fina-finai na bakin ciki na crystalline guda ɗaya, irin su lokaci guda InGaN epilayers, kayan III-N, da fina-finai na semiconductor tare da tsarin rijiyar da yawa, kuma yana da mahimmanci a cikin kera na'urorin semiconductor da na'urorin optoelectronic.
TheSiC shafi MOCVD mai cutarwaƙwararren mai riƙe wafer ne mai rufi da silicon carbide (SiC) donepitaxial girma a cikin ƙarfe Organic sinadaran tururi ajiya (MOCVD) tsari.
Rufin SiC yana da kyakkyawan juriya na sinadarai da kwanciyar hankali na thermal, yana mai da shi kyakkyawan zaɓi ga masu cutar MOCVD da aka yi amfani da su wajen buƙatar hanyoyin haɓaka epitaxial.
Maɓalli mai mahimmanci na tsarin MOCVD shine mai raɗaɗi, wanda shine maɓalli mai mahimmanci don tabbatar da daidaituwa da ingancin fina-finai na bakin ciki da aka samar.
Menene mai cutarwa? Mai raɗaɗi wani abu ne na musamman da aka yi amfani da shi a cikin tsarin MOCVD don tallafawa da zafi da abin da aka ajiye fim din na bakin ciki. Yana da ayyuka da yawa, gami da ɗaukar makamashin lantarki, juyar da shi zuwa zafi, da rarraba zafi daidai gwargwado akan ma'aunin. Wannan dumama uniform yana da mahimmanci don haɓakar fina-finai na bakin ciki iri ɗaya tare da madaidaicin kauri da abun da ke ciki.
Nau'in masu cutarwa:
1. Graphite susceptors: Yawancin lokaci ana lulluɓe masu ginshiƙan faifai tare da Layer na kariya kamar su.silicon carbide (SiC), wanda aka sani da babban ƙarfin wutar lantarki da kwanciyar hankali. TheSiC shafiyana ba da ƙasa mai ƙarfi, mai karewa wanda ke tsayayya da lalata da lalata a babban yanayin zafi.
2. Silicon carbide (SiC) susceptors: Wadannan susceptors an yi su gaba ɗaya na SiC kuma suna da kyakkyawar kwanciyar hankali na thermal da juriya. Masu ciwon SiC sun dace musamman don matakan zafi mai zafi da kuma lalata muhalli.
Yadda masu ciwon sukari ke aiki a MOCVD:
A cikin tsarin MOCVD, ana shigar da masu ƙididdigewa a cikin ɗakin amsawa inda suke bazuwa da amsa don samar da fim na bakin ciki akan ƙasa. Mai cutarwa yana taka muhimmiyar rawa ta hanyar tabbatar da cewa an yi zafi sosai a ko'ina, wanda ke da mahimmanci don cimma daidaiton kaddarorin fina-finai a duk faɗin ƙasa. An zaɓi kayan aiki da ƙirar mai ɗaukar hoto a hankali don saduwa da ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun tsari, kamar kewayon zafin jiki da daidaituwar sinadarai.
Fa'idodin yin amfani da masu ƙoshin lafiya masu inganci:
• Ingantattun ingancin fina-finai: Ta hanyar samar da rarraba zafi iri ɗaya, mai ɗaukar hoto yana taimakawa cimma fina-finai tare da daidaiton kauri da abun da ke ciki, wanda ke da mahimmanci ga aikin na'urorin semiconductor.
• Ingantaccen ingantaccen tsari: Masu haɓakawa masu inganci suna haɓaka ingantaccen tsarin MOCVD gabaɗaya ta hanyar rage yiwuwar lahani da haɓaka yawan amfanin fina-finai masu amfani.
• Rayuwar Rayuwa da Amintacce: Abubuwan da aka yi da kayan aiki masu ɗorewa irin su SiC suna tabbatar da aminci na dogon lokaci da rage farashin kulawa.
Wanda ake zargi wani abu ne mai mahimmanci a cikin tsarin MOCVD kuma yana tasiri kai tsaye ga inganci da ingancin ƙaddamar da fim ɗin bakin ciki. Don ƙarin bayani kan samuwan masu girma dabam, MOCVD masu cutarwa da farashi, da fatan a yi shakka a tuntuɓe mu. Injiniyoyin mu za su yi farin cikin ba ku shawara akan kayan da suka dace kuma su amsa duk tambayoyinku.
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Lokacin aikawa: Agusta-12-2024