Menene MOCVD Susceptor?

Karfe-Organic Chemical Vapor Deposition (MOCVD) tsari ne mai mahimmanci a cikin masana'antar semiconductor, inda ake ajiye fina-finai masu inganci masu inganci a kan madauri. Wani muhimmin sashi na tsarin MOCVD shine mai ɗaukar hoto, wani muhimmin abu wanda ke taka muhimmiyar rawa wajen tabbatar da daidaito da ingancin fina-finan da aka samar.

Menene Susceptor? Mai jiwuwa wani yanki ne na musamman da ake amfani da shi a cikin tsarin MOCVD don tallafawa da dumama abin da ake ajiye fina-finai na bakin ciki. Yana aiki da ayyuka da yawa, gami da ɗaukar makamashin lantarki, canza shi zuwa zafi, da rarraba wannan zafi iri ɗaya a cikin ma'aunin. Wannan dumama uniform yana da mahimmanci don haɓakar fina-finai masu kama da madaidaicin kauri da abun da ke ciki.

Nau'o'in Susceptors:
1. Graphite Susceptors: Yawanci ana lulluɓe da Layer na kariya, kamarsilicon carbide (SiC), graphite susceptors an san su da high thermal conductivity da kwanciyar hankali. TheSiC shafiyana ba da ƙasa mai ƙarfi, mai karewa wanda ke tsayayya da lalata da lalata a babban yanayin zafi.

2. Silicon Carbide (SiC) Susceptors: Waɗannan an yi su gaba ɗaya daga SiC, suna ba da kyakkyawar kwanciyar hankali ta thermal da juriya ga lalacewa da tsagewa.SiC masu cutarwamusamman dace da high-zazzabi matakai da lalata yanayi.
YayaMasu cutarwaYi aiki a MOCVD:

A cikin tsarin MOCVD, ana shigar da masu ƙididdigewa a cikin ɗakin reactor, inda suke bazuwa kuma suna amsawa don samar da fim na bakin ciki akan substrate. Mai cutarwa yana taka muhimmiyar rawa ta hanyar tabbatar da cewa substrate ɗin ya yi zafi iri ɗaya, wanda ke da mahimmanci don cimma daidaiton kaddarorin fina-finai a duk faɗin ƙasa. An zaɓi kayan mai abin zargi da ƙira a hankali don dacewa da ƙayyadaddun buƙatun tsarin ajiya, kamar kewayon zafin jiki da daidaituwar sinadarai.
Amfanin AmfaniMasu Susceptors masu inganci:
• Ingantattun Ingantattun Fim: Ta hanyar samar da rarraba zafi iri ɗaya, masu cutarwa suna taimakawa wajen samun fina-finai tare da daidaiton kauri da abun da ke ciki, wanda ke da mahimmanci don aiwatar da na'urorin semiconductor.
• Ƙarfafa Ingantaccen Tsari: Maɗaukaki masu inganci suna inganta ingantaccen tsarin MOCVD gaba ɗaya ta hanyar rage yiwuwar lahani da ƙara yawan amfanin fina-finai masu amfani.
• Tsawon Rayuwa da Amincewa: Masu saɓo da aka yi daga abubuwa masu ɗorewa kamar SiC suna tabbatar da aminci na dogon lokaci da rage farashin kulawa.

Kammalawa: Mai cutarwa wani abu ne mai mahimmanci a cikin tsarin MOCVD, yana tasiri kai tsaye da inganci da ingancin ƙaddamar da fim na bakin ciki. Ta hanyar zabar madaidaicin abu da ƙira, masana'antun semiconductor na iya haɓaka ayyukan su, haifar da ingantaccen aikin na'urar da ƙarancin samarwa. Yayin da buƙatun na'urorin lantarki masu ƙarfi ke ci gaba da haɓaka, mahimmancin ingancin MOCVD susc.