Farashin PFA

Takaitaccen Bayani:

Farashin PFA- Kware da juriya na sinadarai mara misaltuwa da karko tare da Cassette na PFA na Semicera, ingantaccen bayani don aminci da ingantaccen sarrafa wafer a masana'antar semiconductor.


Cikakken Bayani

Tags samfurin

Semicerayana farin cikin bayar daFarashin PFA, zaɓi mai ƙima don sarrafa wafer a cikin mahallin da juriya da ɗorewa ke da mahimmanci. An ƙera shi daga kayan Perfluoroalkoxy (PFA), wannan kaset ɗin an ƙera shi don jure yanayin mafi yawan buƙatu a cikin ƙirƙira na semiconductor, yana tabbatar da aminci da amincin wafers ɗin ku.

Juriya na Sinadarai mara misaltuwaTheFarashin PFAan ƙera shi don samar da juriya mai ɗorewa ga nau'ikan sinadarai masu yawa, yana mai da shi cikakken zaɓi don tafiyar matakai waɗanda suka haɗa da acid mai ƙarfi, kaushi, da sauran sinadarai masu tsauri. Wannan juriya mai ƙarfi na sinadarai yana tabbatar da cewa kaset ɗin ya kasance cikakke kuma yana aiki ko da a cikin mafi yawan lalatattun wurare, ta yadda zai tsawaita tsawon rayuwarsa da rage buƙatar sauyawa akai-akai.

Gine-gine Mai GirmaSemicera'sFarashin PFAan ƙera shi daga kayan PFA mai tsafta, wanda ke da mahimmanci don hana gurɓatawa yayin sarrafa wafer. Wannan babban gini mai tsafta yana rage haɗarin samar da barbashi da ɗigon sinadarai, yana tabbatar da cewa wafers ɗinku sun sami kariya daga ƙazanta waɗanda zasu iya lalata ingancinsu.

Ingantattun Dorewa da AyyukaAn tsara shi don karko, daFarashin PFAyana kiyaye amincin tsarin sa a ƙarƙashin matsanancin yanayin zafi da ƙaƙƙarfan yanayin sarrafawa. Ko an fallasa shi ga yanayin zafi ko kuma an yi masa maimaitawa, wannan kaset ɗin yana riƙe da sifarsa da aikinsa, yana ba da dogaro na dogon lokaci a yanayin masana'anta.

Daidaitaccen Injiniya don Amintaccen GudanarwaTheSemicera PFA Cassetteyana da ingantaccen aikin injiniya wanda ke tabbatar da amintacce kuma karkowar sarrafa wafer. Kowane ramin an ƙera shi a hankali don riƙe wafers a wuri, yana hana duk wani motsi ko motsi wanda zai iya haifar da lalacewa. Wannan ingantaccen aikin injiniya yana goyan bayan daidaitaccen wuri kuma daidaitaccen wafer, yana ba da gudummawa ga ingantaccen tsari gabaɗaya.

Izinin Aikace-aikace Tsakanin TsariGodiya ga mafi girman kayan abu, daFarashin PFAisasshe ne da za a yi amfani da shi a cikin matakai daban-daban na ƙirƙira semiconductor. Ya dace musamman don rigar etching, sinadari tururi jita-jita (CVD), da sauran hanyoyin da suka haɗa da mahallin sinadarai masu tsauri. Daidaitawar sa ya sa ya zama kayan aiki mai mahimmanci don kiyaye amincin tsari da ingancin wafer.

Alƙawari ga inganci da ƘirƙiriA Semicera, mun himmatu don samar da samfuran da suka dace da mafi girman matsayin masana'antu. TheFarashin PFAyana misalta wannan alƙawarin, yana ba da ingantaccen bayani wanda ke haɗa kai cikin tsarin masana'antar ku. Kowane kaset yana ɗaukar tsauraran matakan inganci don tabbatar da ya cika ƙaƙƙarfan ƙa'idodin aikinmu, yana ba da kyakkyawan yanayin da kuke tsammani daga Semicera.

Abubuwa

Production

Bincike

Dummy

Crystal Parameters

Polytype

4H

Kuskuren daidaita yanayin saman

<11-20>4±0.15°

Ma'aunin Wutar Lantarki

Dopant

n-nau'in Nitrogen

Resistivity

0.015-0.025ohm · cm

Ma'aunin injina

Diamita

150.0 ± 0.2mm

Kauri

350± 25 μm

Matsakaicin firamare

[1-100]±5°

Tsawon lebur na farko

47.5 ± 1.5mm

Filayen sakandare

Babu

TTV

≤5m ku

≤10 μm

≤15 μm

LTV

≤3 μm (5mm*5mm)

≤5 μm (5mm*5mm)

≤10 μm (5mm*5mm)

Ruku'u

- 15 μm ~ 15 μm

- 35 μm ~ 35 μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Gaba (Si-face) rashin ƙarfi (AFM)

Ra≤0.2nm (5μm*5μm)

Tsarin

Yawan bututu

<1 ku/cm2

<10 a/cm2

<15 ku/cm2

Karfe najasa

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Ingancin Gaba

Gaba

Si

Ƙarshen saman

Farashin CMP

Barbashi

≤60ea/wafer (size≥0.3μm)

NA

Scratches

≤5ea/mm. Tarin tsayin ≤ Diamita

Tsawon tsayi≤2*Diamita

NA

Bawon lemu/ramuka/tabo/tabas/ fasa/kamuwa

Babu

NA

Gefen kwakwalwan kwamfuta / indents / karaya / hex faranti

Babu

Yankunan polytype

Babu

Tarin yanki≤20%

Tarin yanki≤30%

Alamar Laser ta gaba

Babu

Kyakkyawan Baya

Baya gamawa

C-face CMP

Scratches

≤5ea/mm, Tsawon Tara≤2* Diamita

NA

Lalacewar baya (guntuwar baki/indents)

Babu

Baƙar fata

Ra≤0.2nm (5μm*5μm)

Alamar Laser na baya

1 mm (daga saman gefen)

Gefen

Gefen

Chamfer

Marufi

Marufi

Epi- shirye tare da marufi

Marufin kaset mai yawa-wafer

* Bayanan kula: "NA" yana nufin babu buƙatar Abubuwan da ba a ambata ba suna iya komawa zuwa SEMI-STD.

tech_1_2_size
SiC wafers

  • Na baya:
  • Na gaba: