Semicerayana farin cikin bayar daFarashin PFA, zaɓi mai ƙima don sarrafa wafer a cikin mahallin da juriya da ɗorewa ke da mahimmanci. An ƙera shi daga kayan Perfluoroalkoxy (PFA), wannan kaset ɗin an ƙera shi don jure yanayin mafi yawan buƙatu a cikin ƙirƙira na semiconductor, yana tabbatar da aminci da amincin wafers ɗin ku.
Juriya na Sinadarai mara misaltuwaTheFarashin PFAan ƙera shi don samar da juriya mai ɗorewa ga nau'ikan sinadarai masu yawa, yana mai da shi cikakken zaɓi don tafiyar matakai waɗanda suka haɗa da acid mai ƙarfi, kaushi, da sauran sinadarai masu tsauri. Wannan ƙwaƙƙarfan juriya na sinadarai yana tabbatar da cewa kaset ɗin ya kasance cikakke kuma yana aiki ko da a cikin mahalli mafi lalacewa, ta yadda zai tsawaita rayuwarsa da rage buƙatar maye gurbin akai-akai.
Gine-gine Mai GirmaSemicera'sFarashin PFAan ƙera shi daga kayan PFA mai tsafta, wanda ke da mahimmanci don hana gurɓatawa yayin sarrafa wafer. Wannan babban gini mai tsafta yana rage haɗarin samar da barbashi da ɗigon sinadarai, yana tabbatar da cewa wafers ɗinku sun sami kariya daga ƙazanta waɗanda zasu iya lalata ingancinsu.
Ingantattun Dorewa da AyyukaAn tsara shi don karko, daFarashin PFAyana kiyaye mutuncin tsarin sa a ƙarƙashin matsanancin yanayin zafi da ƙaƙƙarfan yanayin sarrafawa. Ko an fallasa shi ga yanayin zafi ko kuma an yi masa maimaitawa, wannan kaset ɗin yana riƙe da sifarsa da aikinsa, yana ba da dogaro na dogon lokaci a yanayin masana'anta.
Daidaitaccen Injiniya don Amintaccen GudanarwaTheSemicera PFA Cassetteyana da ingantaccen aikin injiniya wanda ke tabbatar da amintacce kuma karkowar sarrafa wafer. Kowane ramin an ƙera shi a hankali don riƙe wafers a wuri, yana hana duk wani motsi ko motsi wanda zai iya haifar da lalacewa. Wannan ingantaccen aikin injiniya yana goyan bayan daidaitaccen wuri kuma daidaitaccen wafer, yana ba da gudummawa ga ingantaccen tsari gabaɗaya.
Izinin Aikace-aikace Tsakanin TsariGodiya ga mafi girman kayan abu, daFarashin PFAisasshe ne da za a yi amfani da shi a cikin matakai daban-daban na ƙirƙira semiconductor. Ya dace musamman don rigar etching, sinadari tururi jita-jita (CVD), da sauran hanyoyin da suka haɗa da mahallin sinadarai masu tsauri. Daidaitawar sa ya sa ya zama kayan aiki mai mahimmanci don kiyaye amincin tsari da ingancin wafer.
Alƙawari ga inganci da ƘirƙiriA Semicera, mun himmatu don samar da samfuran da suka dace da mafi girman matsayin masana'antu. TheFarashin PFAyana misalta wannan alƙawarin, yana ba da ingantaccen bayani wanda ke haɗa kai cikin tsarin masana'antar ku. Kowane kaset yana ɗaukar tsauraran matakan inganci don tabbatar da ya cika ƙaƙƙarfan ƙa'idodin aikinmu, yana ba da kyakkyawan yanayin da kuke tsammani daga Semicera.
Abubuwa | Production | Bincike | Dummy |
Crystal Parameters | |||
Polytype | 4H | ||
Kuskuren daidaita yanayin saman | <11-20>4±0.15° | ||
Ma'aunin Wutar Lantarki | |||
Dopant | n-nau'in Nitrogen | ||
Resistivity | 0.015-0.025ohm · cm | ||
Ma'aunin injina | |||
Diamita | 150.0 ± 0.2mm | ||
Kauri | 350± 25 μm | ||
Matsakaicin firamare | [1-100]±5° | ||
Tsawon lebur na farko | 47.5 ± 1.5mm | ||
Filayen sakandare | Babu | ||
TTV | ≤5m ku | ≤10 μm | ≤15 μm |
LTV | ≤3 μm (5mm*5mm) | ≤5 μm (5mm*5mm) | ≤10 μm (5mm*5mm) |
Ruku'u | - 15 μm ~ 15 μm | - 35 μm ~ 35 μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Gaba (Si-face) rashin ƙarfi (AFM) | Ra≤0.2nm (5μm*5μm) | ||
Tsarin | |||
Yawan bututu | <1 ya/cm2 | <10 a/cm2 | <15 ku/cm2 |
Karfe najasa | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
Ingancin Gaba | |||
Gaba | Si | ||
Ƙarshen saman | Farashin CMP | ||
Barbashi | ≤60ea/wafer (size≥0.3μm) | NA | |
Scratches | ≤5ea/mm. Tarin tsayin ≤ Diamita | Tsawon tsayi≤2*Diamita | NA |
Bawon lemu/ramuka/tabo/tabo/ fasa/kamuwa | Babu | NA | |
Gefen kwakwalwan kwamfuta / indents / karaya / hex faranti | Babu | ||
Yankunan polytype | Babu | Tarin yanki≤20% | Tarin yanki≤30% |
Alamar Laser ta gaba | Babu | ||
Kyakkyawan Baya | |||
Baya gamawa | C-face CMP | ||
Scratches | ≤5ea/mm, Tsawon tarawa≤2* Diamita | NA | |
Lalacewar baya (guntuwar baki/indents) | Babu | ||
Baƙar fata | Ra≤0.2nm (5μm*5μm) | ||
Alamar Laser na baya | 1 mm (daga saman gefen) | ||
Gefen | |||
Gefen | Chamfer | ||
Marufi | |||
Marufi | Epi- shirye tare da marufi Marufin kaset mai yawa-wafer | ||
* Bayanan kula: "NA" yana nufin babu buƙatar Abubuwan da ba a ambata ba suna iya komawa zuwa SEMI-STD. |