Silicon tushen GaN epitaxy

Takaitaccen Bayani:

Abubuwan da aka bayar na Semicera Energy Technology Co., Ltd. babban mai ba da kayayyaki ne na ci-gaba na yumbu na semiconductor kuma kawai masana'anta a China waɗanda zasu iya samar da yumbu mai tsabta na silicon carbide lokaci guda (musamman maSake rekstallized SiC) da CVD SiC shafi. Bugu da kari, kamfaninmu kuma ya himmatu ga filayen yumbu kamar alumina, aluminum nitride, zirconia, da silicon nitride, da sauransu.

 

Cikakken Bayani

Tags samfurin

Bayanin Samfura

Kamfaninmu yana bayarwaSiC shafiaiwatar da ayyuka ta hanyar CVD akan farfajiyar graphite, yumbu da sauran kayan, don haka iskar gas na musamman da ke ɗauke da carbon da silicon suna amsawa a babban zafin jiki don samun manyan ƙwayoyin SiC masu tsabta, ƙwayoyin da aka ajiye akan saman kayan da aka rufe, suna kafawa.SIC kariya Layer.

Babban fasali:

1. High zafin jiki oxidation juriya:

juriya na iskar oxygen har yanzu yana da kyau sosai lokacin da zafin jiki ya kai 1600 C.

2. Babban tsarki: sanya ta hanyar tururin sinadarai a ƙarƙashin yanayin chlorination mai zafi.

3. Juriya juriya: babban taurin, m surface, lafiya barbashi.

4. Lalata juriya: acid, alkali, gishiri da kuma Organic reagents.

 

Babban Bayani na CVD-SIC Coating

SiC-CVD Properties

Tsarin Crystal

FCC β lokaci

Yawan yawa

g/cm ³

3.21

Tauri

Vickers taurin

2500

Girman hatsi

μm

2 ~ 10

Tsaftar Sinadari

%

99.99995

Ƙarfin zafi

J·k-1 · K-1

640

Zazzabi Sublimation

2700

Ƙarfin Felexural

MPa (RT 4-maki)

415

Modul na Young

Gpa (4pt lankwasa, 1300 ℃)

430

Ƙarfafa Ƙarfafawa (CTE)

10-6K-1

4.5

Ƙarfafawar thermal

(W/mK)

300

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Semicera wurin aiki
Wurin aiki Semicera 2
Injin kayan aiki
Gudanar da CNN, tsabtace sinadarai, murfin CVD
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