Silicon akan Insulator Wafers

Takaitaccen Bayani:

Semicera's Silicon-on-Insulator wafers suna ba da mafita mai inganci don aikace-aikacen semiconductor na ci gaba. Mafi dacewa don MEMS, firikwensin, da microelectronics, waɗannan wafers suna ba da kyakkyawan keɓewar lantarki da ƙarancin ƙarfin parasitic. Semicera yana tabbatar da ingantaccen masana'anta, yana ba da daidaiton inganci don kewayon sabbin fasahohi. Muna fatan kasancewa abokin tarayya na dogon lokaci a kasar Sin.


Cikakken Bayani

Tags samfurin

Silicon akan Insulator Wafersdaga Semicera an ƙirƙira su don biyan buƙatun haɓakar manyan ayyuka na samar da mafita na semiconductor. Wafers ɗin mu na SOI suna ba da ingantaccen aikin lantarki da rage ƙarfin na'urar parasitic, yana sa su dace don aikace-aikacen ci gaba kamar na'urorin MEMS, na'urori masu auna firikwensin, da haɗaɗɗun da'irori. Ƙwarewar Semicera a cikin samar da wafer yana tabbatar da cewa kowaneSOI waferyana ba da ingantaccen, sakamako mai inganci don buƙatun fasahar zamani na gaba.

MuSilicon akan Insulator Wafersbayar da ma'auni mafi kyaun tsakanin ingancin farashi da aiki. Tare da farashin wafer na soi yana ƙara yin gasa, waɗannan wafers ana amfani da su sosai a cikin kewayon masana'antu, gami da microelectronics da optoelectronics. Tsarin samar da madaidaicin madaidaicin Semicera yana ba da garantin haɗewar wafer mafi girma da daidaito, yana sa su dace da aikace-aikace iri-iri, daga cavity SOI wafers zuwa daidaitaccen wafern silicon.

Mabuɗin fasali:

Mafi ingancin wafers na SOI da aka inganta don aiki a cikin MEMS da sauran aikace-aikace.

Gasa farashin wafer soi don kasuwancin da ke neman ingantattun mafita ba tare da lalata inganci ba.

Madaidaici don fasahar yankan-baki, yana ba da ingantaccen keɓewar lantarki da inganci a cikin silicon akan tsarin insulator.

MuSilicon akan Insulator Wafersan ƙera su don samar da mafita mai mahimmanci, suna tallafawa haɓaka na gaba na ƙira a cikin fasahar semiconductor. Ko kuna aiki akan ramiSOI wafers, MEMS na'urorin, ko silicon a kan insulator aka gyara, Semicera yana ba da wafers wanda ya dace da mafi girman matsayi a cikin masana'antu.

Abubuwa

Production

Bincike

Dummy

Crystal Parameters

Polytype

4H

Kuskuren daidaita yanayin saman

<11-20>4±0.15°

Ma'aunin Wutar Lantarki

Dopant

n-nau'in Nitrogen

Resistivity

0.015-0.025ohm · cm

Ma'aunin injina

Diamita

150.0 ± 0.2mm

Kauri

350± 25 μm

Matsakaicin firamare

[1-100]±5°

Tsawon lebur na farko

47.5 ± 1.5mm

Filayen sakandare

Babu

TTV

≤5m ku

≤10 μm

≤15 μm

LTV

≤3 μm (5mm*5mm)

≤5 μm (5mm*5mm)

≤10 μm (5mm*5mm)

Ruku'u

- 15 μm ~ 15 μm

- 35 μm ~ 35 μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Gaba (Si-face) rashin ƙarfi (AFM)

Ra≤0.2nm (5μm*5μm)

Tsarin

Yawan bututu

<1 ya/cm2

<10 a/cm2

<15 ku/cm2

Karfe najasa

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Ingancin Gaba

Gaba

Si

Ƙarshen saman

Farashin CMP

Barbashi

≤60ea/wafer (size≥0.3μm)

NA

Scratches

≤5ea/mm. Tarin tsayin ≤ Diamita

Tsawon tsayi≤2*Diamita

NA

Bawon lemu/ramuka/tabo/tabo/ fasa/kamuwa

Babu

NA

Gefen kwakwalwan kwamfuta / indents / karaya / hex faranti

Babu

Yankunan polytype

Babu

Tarin yanki≤20%

Tarin yanki≤30%

Alamar Laser ta gaba

Babu

Kyakkyawan Baya

Baya gamawa

C-face CMP

Scratches

≤5ea/mm, Tsawon tarawa≤2* Diamita

NA

Lalacewar baya (guntuwar baki/indents)

Babu

Baƙar fata

Ra≤0.2nm (5μm*5μm)

Alamar Laser na baya

1 mm (daga saman gefen)

Gefen

Gefen

Chamfer

Marufi

Marufi

Epi- shirye tare da marufi

Marufin kaset mai yawa-wafer

* Bayanan kula: "NA" yana nufin babu buƙatar Abubuwan da ba a ambata ba suna iya komawa zuwa SEMI-STD.

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SiC wafers

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