Rahoton da aka ƙayyade na CVD TaC

 

Gabatarwa zuwa CVD TaC Coating:

 

CVD TaC Coating wata fasaha ce da ke amfani da jigon tururin sinadari don saka suturar tantalum carbide (TaC) akan saman wani abu. Tantalum carbide babban kayan yumbu ne mai inganci tare da ingantattun kayan inji da sinadarai. Tsarin CVD yana haifar da fim ɗin TaC mai ɗamara a saman ƙasa ta hanyar iskar gas.

 

Babban fasali:

 

Kyakkyawan taurin da juriya: Tantalum carbide yana da taurin gaske, kuma CVD TaC Coating na iya inganta juriya na juriya. Wannan ya sa suturar ta zama manufa don aikace-aikace a cikin wurare masu girma, irin su kayan aiki da kayan aiki.

Babban Tsayin Zazzabi: TaC coatings kare m tanderu da reactor sassan a yanayin zafi har zuwa 2200 ° C, nuna kyakkyawan kwanciyar hankali. Yana kiyaye sinadarai da kwanciyar hankali na inji a ƙarƙashin matsanancin yanayin zafi, yana sa ya dace da sarrafa zafin jiki da aikace-aikace a cikin yanayin zafi mai zafi.

Kyakkyawan kwanciyar hankali sunadarai: Tantalum carbide yana da juriya mai ƙarfi ga mafi yawan acid da alkalis, kuma CVD TaC Coating na iya hana lalacewa ta hanyar lalacewa a cikin wurare masu lalata.

Babban narkewa: Tantalum carbide yana da babban wurin narkewa (kimanin 3880 ° C), yana barin CVD TaC Coating da za a yi amfani da shi a cikin matsanancin yanayin zafi ba tare da narke ko ƙasƙanci ba.

Kyakkyawan thermal conductivity: TaC shafi yana da haɓakaccen haɓakar thermal, wanda ke taimakawa wajen watsar da zafi yadda ya kamata a cikin matakan zafin jiki da kuma hana zafi na gida.

 

Aikace-aikace masu yiwuwa:

 

• Gallium Nitride (GaN) da Silicon Carbide epitaxial CVD reactor abubuwan da suka haɗa da masu ɗaukar wafer, jita-jita na tauraron dan adam, ruwan shawa, rufi, da masu ɗaukar nauyi.

• Silicon carbide, gallium nitride da aluminum nitride (AlN) abubuwan haɓaka haɓakar kristal ciki har da crucibles, masu riƙe iri, zoben jagora da masu tacewa.

• Abubuwan masana'antu da suka haɗa da abubuwan dumama juriya, bututun allura, zoben rufe fuska da jigin brazing

 

Siffofin aikace-aikacen:

 

• Tsayayyen yanayin zafi sama da 2000C, yana barin aiki a matsanancin zafi
•Mai tsayayya ga hydrogen (Hz), ammonia (NH3), monosilane (SiH4) da silicon (Si), suna ba da kariya a cikin mahallin sinadarai masu tsanani.
• Juriyar girgiza ta thermal yana ba da damar saurin aiki da sauri
• Graphite yana da mannewa mai ƙarfi, yana tabbatar da tsawon rayuwar sabis kuma babu delamination na sutura.
• Tsabtataccen tsafta don kawar da ƙazanta ko ƙazanta marasa amfani
• Madaidaicin ɗaukar hoto zuwa jure juzu'i mai ƙarfi

 

Bayanan fasaha:

 

Shiri na tantalum carbide mai yawa ta CVD:

 Tantalum Carbide Coting Ta Hanyar CVD

TAC shafi tare da high crystallinity da kyau kwarai uniformity:

 TAC shafi tare da high crystallinity da kyau kwarai uniformity

 

 

CVD TAC COATING Ma'aunin Fasaha_Semicera:

 

Kaddarorin jiki na rufin TaC
Yawan yawa 14.3 (g/cm³)
Babban Taro 8 x1015/cm
Takamammen fitarwa 0.3
Ƙididdigar faɗaɗawar thermal 6.3 10-6/K
Hardness (HK) 2000 HK
Juriya mai girma 4.5 om-cm
Juriya 1 x10-5ku*cm
Zaman lafiyar thermal <2500 ℃
Motsi cm 2372/Vs
Girman zane yana canzawa -10-20
Kauri mai rufi ≥20um ƙimar dabi'a (35um+10um)

 

Abubuwan da ke sama sune dabi'u na yau da kullun.

 

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