TaC Coated Plate wani faifai ne na musamman da aka ƙera don amfani a cikin hanyoyin SiC epitaxial, wanda aka ƙera shi da daidaito daga kayan zane mai inganci. An lulluɓe samanta da kyau da tantalum carbide (TaC), wani fili wanda aka sani don tsafta da ƙarfi na musamman. Rufin TaC yana haɓaka ƙarfin farantin da juriya ga yanayin zafi mai girma, yana mai da shi manufa don yanayin da ake buƙata na hanyoyin SiC epitaxial.
Wannan sabon TaC Coated Plate faifai ne na musamman da aka ƙera don amfani a cikin matakan SiC epitaxial, wanda aka ƙera shi da daidaito daga kayan graphite masu inganci. TaC Mai Rufaffen Plate an lulluɓe shi da kyau tare da tantalum carbide (TaC), wani fili wanda aka sani don tsafta da ƙarfi na musamman. yana aiki azaman dandamali mai dogaro don ɗaukar wafers yayin matakai daban-daban na ci gaban SiC epitaxial. Tushen ginshiƙansa mai tsafta yana ba da tsayayye da ƙasa mara ƙarfi, yayin da murfin TaC yana ƙara ƙarin kariya daga halayen sinadarai da lalacewa.
SemizamaniTaC Coated Plate an keɓance shi bisa ƙayyadaddun buƙatun abokan ciniki, yana tabbatar da ingantaccen aiki da dacewa da tsarin su na SiC epitaxial. Ko girmansa, siffarsa, ko wasu ƙayyadaddun bayanai, waɗannan faranti an keɓance su don biyan buƙatun kowane aikace-aikace.
tare da kuma ba tare da TaC ba
Bayan amfani da TaC (dama)
Har ila yau, Semicera'sTaC-rufi kayayyakinnuna tsawon rayuwar sabis da mafi girman juriya mai zafi idan aka kwatanta daFarashin SiC.Ma'auni na dakin gwaje-gwaje sun nuna cewa namuTaC shafina iya yin aiki akai-akai a yanayin zafi har zuwa digiri Celsius 2300 na tsawon lokaci. A ƙasa akwai wasu misalan samfuran mu:
