Tantalum Carbide CVD Coating EPI Susceptor

Takaitaccen Bayani:

Graphite kyakkyawan abu ne mai zafin jiki, amma yana oxidizes sauƙi a yanayin zafi. Ko da a cikin tanderu mai amfani da iskar gas, har yanzu yana iya jurewa jinkirin iskar oxygen. Yin amfani da CVD tantalum carbide (TaC) shafi na iya kare kariya mai mahimmanci na graphite yadda ya kamata, yana ba da juriya mai zafi iri ɗaya kamar graphite. TaC kuma wani abu ne wanda ba shi da amfani, ma'ana ba zai amsa da iskar gas kamar argon ko hydrogen a yanayin zafi ba.TambayaTantalum Carbide CVD Coating EPI Susceptor yanzu!

 


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Semicera yana ba da suturar tantalum carbide na musamman (TaC) don sassa daban-daban da masu ɗaukar kaya.Semicera manyan shafi tsari sa tantalum carbide (TaC) coatings cimma high tsarki, high zafin jiki kwanciyar hankali da kuma high sinadaran haƙuri, inganta samfurin ingancin SIC / GAN lu'ulu'u da EPI yadudduka (EPI)Mai ɗaukar hoto TaC mai ɗaukar hoto), da kuma tsawaita rayuwar mahimmin abubuwan da aka gyara. Yin amfani da tantalum carbide TaC shafi shine don magance matsalar gefen kuma inganta ingancin ci gaban kristal, kuma Semicera ya sami nasarar warware fasahar suturar tantalum carbide (CVD), ta kai matakin ci gaba na duniya.

 

Graphite kyakkyawan abu ne mai zafin jiki, amma yana oxidizes sauƙi a yanayin zafi. Ko da a cikin tanderu mai amfani da iskar gas, har yanzu yana iya jurewa jinkirin iskar oxygen. Yin amfani da CVD tantalum carbide (TaC) shafi na iya kare kariya mai mahimmanci na graphite yadda ya kamata, yana ba da juriya mai zafi iri ɗaya kamar graphite. TaC kuma wani abu ne wanda ba shi da amfani, ma'ana ba zai amsa da iskar gas kamar argon ko hydrogen a yanayin zafi ba.TambayaTantalum Carbide CVD Coating EPI Susceptor yanzu!

Bayan shekaru na ci gaba, Semicera ya ci nasara da fasaha naCVD TACtare da kokarin hadin gwiwa na sashen R&D. Rashin lahani yana da sauƙin faruwa a cikin tsarin ci gaban SiC wafers, amma bayan amfaniTaC, bambancin yana da mahimmanci. A ƙasa akwai kwatancen wafers tare da kuma ba tare da TaC ba, da kuma sassan Simicera don haɓakar kristal guda ɗaya.

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tare da kuma ba tare da TaC ba

微信图片_20240227150053

Bayan amfani da TaC (dama)

Har ila yau, Semicera'sTaC-rufi kayayyakinnuna tsawon rayuwar sabis da mafi girman juriya mai zafi idan aka kwatanta daFarashin SiC.Ma'auni na dakin gwaje-gwaje sun nuna cewa namuTaC shafina iya yin aiki akai-akai a yanayin zafi har zuwa digiri Celsius 2300 na tsawon lokaci. A ƙasa akwai wasu misalan samfuran mu:

 
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