Semicera yana gabatar da al'ada mai ingancisiliki carbide cantilever paddlesƙera don haɓaka ayyukan masana'antar semiconductor. SabuntawaSiC paddleƙira yana tabbatar da tsayin daka na musamman da tsayin daka na thermal, yana mai da shi muhimmin sashi don sarrafa wafer a cikin ƙalubalen yanayin zafi mai zafi.
TheSilicon carbide paddlean gina shi don jure matsanancin hawan zafi yayin da yake kiyaye mutuncin tsari, yana tabbatar da abin dogaro da jigilar wafer yayin mahimman matakan samar da semiconductor. Tare da ingantaccen ƙarfin injiniya, wannanjirgin ruwayana rage haɗarin lalacewa ga wafers, yana haifar da mafi girma yawan amfanin ƙasa da daidaiton samarwa.
Ɗayan mahimman sabbin abubuwa a cikin kwafin SiC na Semicera yana cikin zaɓin ƙirar sa na al'ada. An keɓance shi don biyan takamaiman buƙatun samarwa, paddle ɗin yana ba da sassauci a cikin haɗin kai tare da saitin kayan aiki daban-daban, yana mai da shi mafita mai kyau don hanyoyin ƙirƙira na zamani. Ginin mai sauƙi amma mai ƙarfi yana ba da damar sauƙi mai sauƙi kuma yana rage lokacin aiki, yana ba da gudummawa ga ingantacciyar inganci a samar da semiconductor.
Bugu da kari ga thermal da inji Properties, daSilicon carbide paddleyana ba da kyakkyawan juriya na sinadarai, yana ba shi damar yin abin dogaro har ma a cikin mahallin sinadarai masu tsauri. Wannan ya sa ya dace musamman don amfani a cikin tafiyar matakai da suka shafi etching, ajiya, da magani mai zafi, inda kiyaye amincin jirgin ruwan wafer yana da mahimmanci don tabbatar da ingantaccen kayan aiki.
Kaddarorin jiki na Silicon Carbide Recrystallized | |
Dukiya | Mahimmanci Na Musamman |
Yanayin aiki (°C) | 1600°C (tare da oxygen), 1700°C (rage yanayi) |
SiC abun ciki | 99.96% |
Abin ciki na kyauta | <0.1% |
Yawan yawa | 2.60-2.70 g/cm3 |
Bayyanar porosity | <16% |
Ƙarfin matsi | > 600 MPa |
Ƙarfin lanƙwasa sanyi | 80-90 MPa (20°C) |
Ƙarfin lanƙwasawa mai zafi | 90-100 MPa (1400°C) |
Thermal fadada @1500°C | 4.70 10-6/°C |
Ƙarfin zafin jiki @1200°C | 23 W/m•K |
Na roba modules | 240 GPA |
Thermal girgiza juriya | Madalla da kyau |