Silicon carbide wafer samar da tsari

Silicon carbide waferAn yi shi da babban foda na siliki mai tsabta da foda mai tsabta mai tsabta kamar kayan albarkatun kasa, kuma ana yin siliki carbide crystal ta hanyar canja wurin tururi ta jiki (PVT), kuma ana sarrafa shi cikinsiliki carbide wafer.

① Raw material kira. High tsarki silicon foda da high tsarki carbon foda aka hade bisa ga wani rabo, da silicon carbide barbashi da aka hada a high zafin jiki sama da 2,000 ℃. Bayan murkushewa, tsaftacewa da sauran matakai, ana shirya kayan albarkatun ƙasa mai tsabta silicon carbide wanda ya dace da buƙatun ci gaban kristal.

② Girman Crystal. Yin amfani da foda mai tsabta na SIC a matsayin albarkatun kasa, an girma crystal ta hanyar canja wurin tururi ta jiki (PVT) ta hanyar amfani da wutar lantarki mai girma.

③ sarrafa ingot. Ingot silicon carbide crystal ingot da aka samu an daidaita shi ta hanyar X-ray single crystal orientator, sa'an nan kuma ƙasa kuma an yi birgima, kuma an sarrafa shi zuwa daidaitaccen diamita na silicon carbide crystal.

④ Crystal yankan. Yin amfani da kayan yankan layu da yawa, lu'ulu'u na silicon carbide an yanke su cikin zanen bakin ciki tare da kauri wanda bai wuce 1mm ba.

⑤ Chip niƙa. An niƙa wafer ɗin zuwa ga laushi da ƙazanta da ake so ta hanyar niƙa ruwan lu'u-lu'u masu girma dabam dabam dabam.

⑥ Chip polishing. Silicon carbide da aka goge ba tare da lalacewa ta sama an samu ta hanyar goge gogen injina da goge gogen injuna ba.

⑦ Gano guntu. Yi amfani da microscope na gani, X-ray diffractometer, microscope mai ƙarfi atomic, mai gwajin gwagwarmaya mara lamba, mai gwadawa mai ɗorewa, mai gwadawa mai cikakken lahani da sauran kayan aiki da kayan aiki don gano ƙarancin microtubule, ingancin crystal, ƙarancin ƙasa, tsayayya, warpage, curvature, kauri canji, surface karce da sauran sigogi na silicon carbide wafer. Bisa ga wannan, an ƙayyade ingancin matakin guntu.

⑧ Tsabtace guntu. Ana tsaftace takardar polishing na silicon carbide tare da wakili mai tsaftacewa da ruwa mai tsabta don cire ragowar ruwa mai gogewa da sauran datti a kan takardar polishing, sa'an nan kuma an busa wafer kuma girgiza ta bushe ta hanyar ultra-high tsarki nitrogen da injin bushewa; An lulluɓe wafer ɗin a cikin akwati mai tsabta a cikin babban ɗaki mai tsafta don samar da wafer silicon carbide mai shirye don amfani a ƙasa.

Girman guntu mafi girma, mafi wahala daidaitaccen haɓakar kristal da fasahar sarrafawa, kuma mafi girman ingancin masana'anta na na'urori na ƙasa, ƙananan farashin naúrar.