Wafer Boat

Takaitaccen Bayani:

Jiragen ruwan wafer sune mahimman abubuwan haɗin gwiwa a cikin tsarin masana'antar semiconductor. Semiera yana da ikon samar da jiragen ruwa na wafer waɗanda aka kera musamman kuma aka samar don hanyoyin watsawa, waɗanda ke taka muhimmiyar rawa wajen kera manyan hanyoyin haɗin gwiwa. Mun dage sosai wajen samar da ingantattun kayayyaki a farashi masu gasa kuma muna fatan zama abokin tarayya na dogon lokaci a kasar Sin.


Cikakken Bayani

Tags samfurin

Amfani

High zafin jiki oxidation juriya
Kyakkyawan juriya na lalata
Kyakkyawan juriya abrasion
High coefficient na zafi conductivity
Ƙaunar kai, ƙananan yawa
Babban taurin
Ƙirar ƙira.

HGF (2)
HGF (1)

Aikace-aikace

-Filin mai jurewa sawa: bushing, faranti, bututun bututun iska, rufin cyclone, ganga mai niƙa, da sauransu ...
-Babban Zazzabi Filin: siC Slab, Quenching Furnace Tube, Radiant Tube, Crucible, Heat Element, Roller, Beam, Heat Exchanger, Cold Air Pipe, Burner Nozzle, Thermocouple Kariya Tube, SiC jirgin ruwa, Kiln mota Tsarin, Setter, da dai sauransu.
-Silicon Carbide Semiconductor: SiC wafer jirgin ruwa, sic chuck, sic paddle, sic cassette, sic diffusion tube, wafer cokali mai yatsa, tsotsa farantin, jagora, da dai sauransu.
- Filin Hatimin Silicon Carbide: kowane nau'in zoben rufewa, ɗaukar kaya, bushing, da sauransu.
- Filin Hoto: Cantilever Paddle, Nika Ganga, Silicon Carbide Roller, da dai sauransu.
- Filin Batirin Lithium

WAFAR (1)

WATA (2)

Abubuwan Jiki Na SiC

Dukiya Daraja Hanya
Yawan yawa 3.21 g/c Nitse-tasowa da girma
Musamman zafi 0.66 J/g °K Filashin Laser mai ƙwanƙwasa
Ƙarfin sassauƙa 450 MPa 560 MPa Lankwasa maki 4, lanƙwasa maki RT4, 1300°
Karya tauri 2.94MPa m1/2 Microindentation
Tauri 2800 Vickers, 500 g na kaya
Elastic ModulusYoung's Modulus 450 GPA430 4 pt lanƙwasa, RT4 pt lanƙwasa, 1300 °C
Girman hatsi 2-10 m SEM

Abubuwan da aka bayar na thermal na SiC

Thermal Conductivity 250 W/m °K Hanyar filasha Laser, RT
Ƙarfafa Ƙarfafawa (CTE) 4.5 x 10-6 °K Yanayin zafin jiki zuwa 950 ° C, silica dilatometer

Ma'aunin Fasaha

Abu Naúrar Bayanai
RBSiC (SiSiC) NBSiC SSiC RSiC OSiC
SiC abun ciki % 85 75 99 99.9 ≥99
Abubuwan da ke cikin siliki kyauta % 15 0 0 0 0
Matsakaicin zafin sabis 1380 1450 1650 1620 1400
Yawan yawa g/cm3 3.02 2.75-2.85 3.08-3.16 2.65-2.75 2.75-2.85
Bude porosity % 0 13-15 0 15-18 7-8
Karfin lankwasawa 20 ℃ ina 250 160 380 100 /
Karfin lankwasawa 1200 ℃ ina 280 180 400 120 /
Modulus na elasticity 20 ℃ Gpa 330 580 420 240 /
Modulus na elasticity 1200 ℃ Gpa 300 / / 200 /
Thermal conductivity 1200 ℃ W/mK 45 19.6 100-120 36.6 /
Coefficient na thermal fadadawa K-1X10-6 4.5 4.7 4.1 4.69 /
HV Kg/mm2 2115 / 2800 / /

CVD silicon carbide shafi a saman farfajiyar recrystallized silicon carbide yumbu kayayyakin iya isa da tsarki fiye da 99.9999% saduwa da bukatun abokan ciniki a cikin semiconductor masana'antu.

Semicera wurin aiki
Wurin aiki Semicera 2
Injin kayan aiki
Gudanar da CNN, tsabtace sinadarai, murfin CVD
Hidimarmu

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