Semicera'sSiC paddlesan ƙera su don ƙaramin haɓakar zafi, samar da kwanciyar hankali da daidaito a cikin matakai inda daidaiton girman ke da mahimmanci. Wannan ya sa su dace don aikace-aikace indawafersana fuskantar sake zagayowar dumama da sanyaya, yayin da kwale-kwalen wafer yana kiyaye amincin tsarin sa, yana tabbatar da daidaiton aiki.
Haɗa Semicera'ssiliki-carbide diffusion paddlescikin layin samar da ku zai haɓaka amincin tsarin ku, godiya ga mafi girman yanayin zafi da sinadarai. Wadannan paddles cikakke ne don yaduwa, oxygenation, da tafiyar matakai, tabbatar da cewa ana sarrafa wafers tare da kulawa da daidaito a kowane mataki.
Innovation yana cikin jigon Semicera'sSiC paddlezane. An ƙera waɗannan paddles don dacewa da kayan aikin semiconductor na yanzu, suna samar da ingantacciyar kulawa. Tsarin nauyi mai nauyi da ƙirar ergonomic ba kawai inganta jigilar wafer ba har ma yana rage lokacin aiki, yana haifar da ingantaccen samarwa.
| Kaddarorin jiki na Silicon Carbide Recrystallized | |
| Dukiya | Mahimmanci Na Musamman |
| Yanayin aiki (°C) | 1600°C (tare da oxygen), 1700°C (rage yanayi) |
| SiC abun ciki | 99.96% |
| Abin ciki na kyauta | <0.1% |
| Yawan yawa | 2.60-2.70 g/cm3 |
| Bayyanar porosity | <16% |
| Ƙarfin matsi | > 600 MPa |
| Ƙarfin lanƙwasa sanyi | 80-90 MPa (20°C) |
| Ƙarfin lanƙwasawa mai zafi | 90-100 MPa (1400°C) |
| Thermal fadada @1500°C | 4.70 10-6/°C |
| Ƙarfin zafin jiki @1200°C | 23 W/m•K |
| Na roba modules | 240 GPA |
| Thermal girgiza juriya | Madalla da kyau |
